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課程名稱 |
奈米光機電系統
OPTICAL NANO-ELECTRO-MECHANICAL SYSTEM |
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開課學期 |
96-2 |
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授課對象 |
電機資訊學院 電機工程學研究所 |
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授課教師 |
蔡睿哲 |
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課號 |
OE5027 |
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課程識別碼 |
941 U0360 |
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班次 |
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學分 |
3 |
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全/半年 |
半年 |
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必/選修 |
選修 |
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上課時間 |
星期三6,7,8(13:20~16:20) |
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上課地點 |
博理114 |
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備註 |
總人數上限：59人 |
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Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/962moems |
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課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
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課程大綱
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課程概述 |
1) Introduction: development from MEMS to NEMS
2) Fabrication technologies of micro device and nano-etch technology
3) Governing physics in micro/nano world including actuation mechanism and mechanical structures
4) Short introduction to optics in free space and wave guides
5) Optical MEMS/NEMS devices and case studies
6) Project presentations (or reports) by students |
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課程目標 |
This course will focus on micro/nano devices and their applications in optics. The material will cover the principles, designs, and fabrication processes behind this emerging technology. |
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課程要求 |
成績評量方式:
Midterm 30%
Final 40%
Project 30%
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預期每週課後學習時數 |
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Office Hours |
另約時間 |
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指定閱讀 |
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參考書目 |
- Marc J. Madou, “Fundamentals of Microfabrication: The Science of
Miniaturization,” Second Edition, CRC Press (ISBN: 0-8493-0826-7)
- Steve Senturia, “Microsystem Design,” Kluwer Academic Publishers, 2001
- Gregory T. A. Kovacs, “Micromachined Transducers - Sourcebook,” WCB McGraw-Hill.
- Reading Assignment |
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評量方式
(僅供參考) |
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No. |
項目 |
百分比 |
說明 |
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1. |
Project |
30% |
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2. |
Midterm Exam |
30% |
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3. |
Final Exam |
40% |
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